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Czochralski method

Czochralski method

The Czochralski method, also Czochralski technique or Czochralski process, is a method of crystal growth used to obtain single crystals of semiconductors, like silicon.

Schematic diagram

/czochralski-method/Czochralski_Process.svg.png
提拉法示意图

  1. 多晶硅和掺杂物的熔化
  2. 向熔融物中放入晶种
  3. 晶体开始生长
  4. 缓慢向上提拉棒,同时棒与下面的坩埚之间以反方向旋转
  5. 单晶硅生长完成